Single step processing tools in cooperation with the Fraunhofer Institute of Integrated Systems and Device Technology and the University of Erlangen :
- Spray Coating & Projection Alignment
- Photolithography
- KOH Etching
- Wet Cleaning, Etching
- Deep Reactive Ion Etching (DRIE)
- Focused Ion Beam (FIB)
- Ion Implantation
- Thermal Oxidation
- Low Pressure Chemical Vapor Deposition (LPCVD)
- Plasma Enhanced Chemical Vapor Deposition (PECVD)
- Metallization
- Scanning Probe Microscopy (SPM)
- Scanning Electron Microscopy (SEM)
- Surface Profiling